Numerical modelling of electromechanical coupling using fictitious domain and level set methods. (English) Zbl 1176.78027
Summary: We present a finite element formulation for simulation of electromechanical coupling using a combination of fictitious domain and level set methods. The electric field is treated with a fixed (Eulerian-like) mesh, whereas the structure (taken as a perfect conductor) is modelled with a conventional Lagrangian approach. The compatibility between the potential of the conductor and of the electric domain is obtained by introducing a Lagrange multiplier function, defined on the boundary of the conductor. The electromechanical forces are obtained using a variational formulation for the coupled electromechanical domain. We use a Heaviside function on the level set to remove the electric energy in the conductor domain. Results are presented for an radio frequency switch and an element of a comb drive.
MSC:
| 78M10 | Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory |
| 78M30 | Variational methods applied to problems in optics and electromagnetic theory |
| 78A55 | Technical applications of optics and electromagnetic theory |
Keywords:
electromechanical coupling; fictitious domain method; Lagrange multipliers; level set method; finite element method; micro-electro mechanical systemsSoftware:
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