×

Glass-modified stress waves for adhesion measurement of ultra thin films for device applications. (English) Zbl 1049.74502

Summary: Laser-generated stress wave profiles with rarefaction shocks (almost zero post-peak decay times) have been uncovered in different types of glasses and presented in this communication. The rise time of the pulses was found to increase with their amplitude, with values reaching as high as 50 ns. This is in contrast to measurements in other brittle crystalline solids where pulses with rise times of 1–2 ns and post-peak decay times of 16–20 ns were recorded. The formation of rarefaction shock is attributed to the increased compressibility of glasses with increasing pressures. This was demonstrated using a one-dimensional nonlinear elastic wave propagation model in which the wave speed was taken as a function of particle velocity. The technological importance of these pulses in measuring the tensile strength of very thin film interfaces is demonstrated by using a previously developed laser spallation experiment in which a laser-generated compressive stress pulse in the substrate reflects into a tensile wave from the free surface of the film and pries off its interface at a threshold amplitude. Because of the rarefaction shock, glass-modified waves allow generation of substantially higher interfacial tensile stress amplitudes compared with those with finite post-peak decay profiles. Thus, for the first time, tensile strengths of very strong and ultra thin film interfaces can be measured. Results presented here indicate that interfaces of 185-nm-thick films, and with strengths as high as 2.7 GPa, can be measured. Thus, an important advance has been made that should allow material optimization of ultra thin layer systems that may form the basis of future MEMS-based microelectronic, mechanical and clinical devices.

MSC:

74-05 Experimental work for problems pertaining to mechanics of deformable solids
74J40 Shocks and related discontinuities in solid mechanics
74K35 Thin films
Full Text: DOI

References:

[1] Abou-Sayed, A. S.; Clifton, R. J., Pressure shear waves in fused silica, J. Appl. Phys., 47, 5, 1762-1770 (1976)
[2] Barker, L. M.; Hollenbach, R. E., Shock-wave studies of PMMA, fused silica, and sapphire, J. Appl. Phys., 41, 10, 4208-4226 (1970)
[3] Clifton, R.J., Mello, M., Brar, N.S., 1998. Effect of shear on failure waves in soda lime glass. Shock Compression of Condensed Matter—1997. The American Institute of Physics, New York, pp. 521-524.; Clifton, R.J., Mello, M., Brar, N.S., 1998. Effect of shear on failure waves in soda lime glass. Shock Compression of Condensed Matter—1997. The American Institute of Physics, New York, pp. 521-524.
[4] Kitty van Dijk, Gupta, V., Yu, A.K., Jansen, J.A., 1998. Measurement and control of interface strength of rf “magnetron sputtered CA-PO-Coatings on Ti-6Al-4V substrates by using the laser spallation technique.” J. Biomed. Mater. Res. 41, 624-632.; Kitty van Dijk, Gupta, V., Yu, A.K., Jansen, J.A., 1998. Measurement and control of interface strength of rf “magnetron sputtered CA-PO-Coatings on Ti-6Al-4V substrates by using the laser spallation technique.” J. Biomed. Mater. Res. 41, 624-632.
[5] Kireev, Gupta, 2003. in preparation.; Kireev, Gupta, 2003. in preparation.
[6] Gupta, V.; Pronin, A. N., New technique to measure the toughness of thin-film interfaces, J. Am. Ceram. Soc., 78, 5, 1397-1400 (1995)
[7] Gupta, V.; Pronin, A. N., Effect of substrate orientation and deposition mode on the tensile strength and toughness of Nb/sapphire interfaces, J. Am. Ceram. Soc., 80, 12, 3172-3180 (1995)
[8] Gupta, V.; Argon, A. S.; Cornie, J. A.; Parks, D. M., Measurement of interface strength by laser spallation technique, J. Mech. Phys. Solids, 40, 1, 141-180 (1992)
[9] Mittal, K., Selected bibliography on adhesion measurement of films and coatings, J. Adhes. Sci. Technol., 1, 3, 247-259 (1987)
[10] Pronin, A. N.; Gupta, V., Interferometry on diffuse surfaces in high-velocity measurements, Rev. Sci. Instrum., 64, 8, 2233-2236 (1993)
[11] Pronin, A. N.; Gupta, V., Measurement of thin film interface toughness by using laser-generated stress pulses, J. Mech. Phys. Solids, 46, 3, 389-410 (1998)
[12] Raiser, G. F.; Wise, J. L.; Clifton, R. J.; Grady, D. E.; Cox, D. E., Plate impact response of ceramics and glasses, J. Appl. Phys., 75, 8, 3862-3869 (1994)
[13] Yuan, J.; Gupta, V., Measurement of interface strength by the modified laser spallation experiment. Part Iexperimental technique and modeling the spallation process, J. Appl. Phys., 74, 4, 2388-2404 (1993)
[14] Yuan, J.; Gupta, V., Measurement of interface strength by the modified laser spallation experiment. Part IIapplication to metal-ceramic interfaces, J. Appl. Phys., 74, 4, 2388-2404 (1993)
[15] Yuan, J.; Gupta, V., The effect of microstructures and chemistry on tensile strength of Nb/sapphire interfaces, with and without the interlayers of Cr and Sb, Acta Metall. Mater., 43, 2, 781-794 (1995)
[16] Yuan, J.; Gupta, V.; Pronin, A. N., Measurement of interface strength by the modified laser spallation experiment. Part III: experimental optimization of the stress pulse, J. Appl. Phys., 74, 4, 2405-2410 (1993)
[17] Yuan, J.; Gupta, V.; Kim, M., Structure and chemistry of Nb/sapphire interfaces, with and without interlayers of Sb and Cr, Acta Metall. Mater., 43, 2, 769-779 (1995)
This reference list is based on information provided by the publisher or from digital mathematics libraries. Its items are heuristically matched to zbMATH identifiers and may contain data conversion errors. In some cases that data have been complemented/enhanced by data from zbMATH Open. This attempts to reflect the references listed in the original paper as accurately as possible without claiming completeness or a perfect matching.