Finite-element solution of the semiconductor transport equations. (English) Zbl 0554.65087
Computing methods in applied sciences and engineering VI, Proc. 6th Int. Symp., Versailles 1983, 697-711 (1984).
[For the entire collection see Zbl 0547.00045.]
Numerical simulation plays an increasingly important role in the design of semiconductor devices. The operating behavior of a semiconductor device is described by three nonlinear partial-differential equations - the semiconductor transport equations. These equations are solved by the finite-element method in one, two or three dimensions, for transient or steady-state conditions. This paper presents a numerical solution technique for the transport equations and a comparison of modeled results with experimental data.
Numerical simulation plays an increasingly important role in the design of semiconductor devices. The operating behavior of a semiconductor device is described by three nonlinear partial-differential equations - the semiconductor transport equations. These equations are solved by the finite-element method in one, two or three dimensions, for transient or steady-state conditions. This paper presents a numerical solution technique for the transport equations and a comparison of modeled results with experimental data.
MSC:
| 65Z05 | Applications to the sciences |
| 65N30 | Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs |
| 78A55 | Technical applications of optics and electromagnetic theory |
| 35Q99 | Partial differential equations of mathematical physics and other areas of application |
