ARTICLE
|
doi:10.20944/preprints202309.1814.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
MEMS; TPoS; anchor loss; quality factor; tether
Online: 27 September 2023 (04:22:14 CEST)
ARTICLE
|
doi:10.20944/preprints202306.1871.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
MEMS Resonators; TPoS; phononic crystals; Quality factor; Anchor loss
Online: 27 June 2023 (10:37:44 CEST)