Awad, M.; Workie, T.B.; Bao, J.-F.; Hashimoto, K.-Y. Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines2023, 14, 1540.
Awad, M.; Workie, T.B.; Bao, J.-F.; Hashimoto, K.-Y. Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines 2023, 14, 1540.
Awad, M.; Workie, T.B.; Bao, J.-F.; Hashimoto, K.-Y. Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines2023, 14, 1540.
Awad, M.; Workie, T.B.; Bao, J.-F.; Hashimoto, K.-Y. Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator. Micromachines 2023, 14, 1540.
Abstract
: This paper proposes a reem-shape phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate on its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape Phononic crystals generate a band gap up to 175MHz with BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and unloaded quality factor from 133,000 to 160,000 representing 33.3-fold and 1.2-fold improvements respectively.
Keywords
MEMS Resonators; TPoS; phononic crystals; Quality factor; Anchor loss
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.