Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 19 Apr 2013 (v1), last revised 16 Jul 2013 (this version, v4)]
Title:Niobium-based superconducting nano-devices fabrication using all-metal suspended masks
View PDFAbstract:We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
Submission history
From: Clemens Winkelmann [view email][v1] Fri, 19 Apr 2013 11:52:28 UTC (887 KB)
[v2] Thu, 25 Apr 2013 10:53:36 UTC (887 KB)
[v3] Mon, 29 Apr 2013 15:21:34 UTC (887 KB)
[v4] Tue, 16 Jul 2013 15:45:25 UTC (909 KB)
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