Summary: The aim of the present study is to present an effect boundary element method (BEM) for electroelastic analysis of ultrathin piezoelectric films/coatings. The troublesome nearly singular integrals, which are crucial in applying the BEM for thin-structural problems, are calculated accurately by using a nonlinear coordinate transformation method. The advanced BEM presented requires no remeshing procedure regardless of the thickness of the thin structure. Promising BEM results with only a small number of boundary elements can be achieved with the relative thickness of the thin piezoelectric film is as small as \(10^{-8}\), which is sufficient for modeling many ultrathin piezoelectric films as used in smart materials and micro-electro-mechanical systems. The present BEM procedure with thin-body capabilities is also extended to general multidomain problems and used to model ultrathin coating/substrate piezoelectric structures. The influence of relative layer-to-substrate thickness and the bimaterial mismatch parameters are carefully investigated. Excellent agreement between numerical and theoretical solutions has been demonstrated.
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