This paper reports two behavioral models for a MEMS capacitive sensor and presents their simulation results for a bootstrapped continuous-time pre-amplifier.
Abstract—This paper reports two behavioral models for a. MEMS capacitive sensor and presents their simulation results for a bootstrapped continuous-time�...
This paper presents an accurate macro model for a capacitive micro accelerometer using Verilog-A tool.
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Mar 21, 2021 � In the electrostatic transduction of devices, capacitance and electrostatic-forces are the most critical parameters need to be evaluated for the�...
Nov 28, 2017 � A simplified equivalent circuit for the analysis of squeezed film effects in a capacitive MEMS accelerometer is reported in this paper.
May 3, 2023 � An analytical model and a fast design strategy are developed to achieve rapid and accurate evaluation and optimization of sensor performance.
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Jul 8, 2015 � In this paper, the design and simulation of conventional slotted and touch mode MEMS capacitive pressure sensor is proposed. The designed�...
A simple highly accurate mathematical method has been developed to calculate capacitance change for MEMS capacitive type sensors with square membranes.
In this paper, a design of MEMS capacitive comb accelerometer for seismology application using COMSOL Multiphysics platform is presented.
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In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic�...