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Development of a Selective Wet-Chemical Etchant for 3D Structuring of Silicon via Nonlinear Laser Lithography
Authors:
Mona Zolfaghari Borra,
Behrad Radfar,
Hisham Nasser,
Tahir Çolakoğlu,
Onur Tokel,
Ahmet Turnalı,
Merve Demirtaş,
Hande Ustunel,
Daniele Toffoli,
F. Ömer İlday,
Raşit Turan,
Ihor Pavlov,
Alpan Bek
Abstract:
Recently-demonstrated high-quality three-dimensional (3D) subsurface laser processing inside crystalline silicon (c-Si) wafers opens a door to a wide range of novel applications in multidisciplinary research areas. Using this technique, a novel maskless micro-pillars with precise control on the surface reflection and coverage are successfully fabricated by etching the laser processed region of c-S…
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Recently-demonstrated high-quality three-dimensional (3D) subsurface laser processing inside crystalline silicon (c-Si) wafers opens a door to a wide range of novel applications in multidisciplinary research areas. Using this technique, a novel maskless micro-pillars with precise control on the surface reflection and coverage are successfully fabricated by etching the laser processed region of c-Si wafer. To achieve this, a particular selective wet chemical etching is developed to follow subsurface laser processing of c-Si to reveal the desired 3D structures with smooth surfaces. Here, we report the development of a novel chromium-free chemical etching recipe based on copper nitrate, which yields substantially smooth surfaces at high etch rate and selectivity on the both laser-processed Si surface and subsurface, i.e., without significant etching of the unmodified Si. Our results show that the etch rate and surface morphology are interrelated and strongly influenced by the composition of the adopted etching solution. After an extensive compositional study performed at room temperature, we identify an etchant with a selectivity of over 1600 times for laser-modified Si with respect to unmodified Si. We also support our findings using density functional theory calculations of HF and Cu adsorption energies, indicating significant diversity on the c-Si and laser-modified surfaces.
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Submitted 14 August, 2023;
originally announced September 2023.
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Si nano-VINe: Electrical Percolation in Quantum-Confined nc-Si:SiO2 Systems
Authors:
Serim Ilday,
Hande Ustunel,
F. Ömer Ilday,
Daniele Toffoli,
Gizem Nogay,
David Friedrich,
René Hübner,
Bernd Schmidt,
Karl-Heinz Heinig,
Rasit Turan
Abstract:
Nanostructures, especially of silicon, are of paramount importance for new generation solar cell applications. The key material requirements for solar cells are good electrical conductivity, confinement of excitons, and a tunable band-gap that allows for tandem arrangements to absorb a maximally large portion of the solar spectrum. However, to date, existing Si-based nanostructures have addressed…
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Nanostructures, especially of silicon, are of paramount importance for new generation solar cell applications. The key material requirements for solar cells are good electrical conductivity, confinement of excitons, and a tunable band-gap that allows for tandem arrangements to absorb a maximally large portion of the solar spectrum. However, to date, existing Si-based nanostructures have addressed these requirements individually. The difficulty is that these requirements are entangled in complex ways, so an effort to improve one can lead to a major trade-offs in the others. In this study, we report on a novel silicon nanostructure, where the key advance is that we have managed to satisfy all the abovementioned requirements simultaneously: We demonstrate that the excitons are confined, the bandgap is tunable, and the electrons can freely travel along the nc-Si network.
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Submitted 17 September, 2013;
originally announced September 2013.
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Density Functional Theory for the Photoionization Dynamics of Uracil
Authors:
D. Toffoli,
P. Decleva,
F. A. Gianturco,
R. R. Lucchese
Abstract:
Photoionization dynamics of the RNA base Uracil is studied in the framework of Density Functional Theory (DFT). The photoionization calculations take advantage of a newly developed parallel version of a multicentric approach to the calculation of the electronic continuum spectrum which uses a set of B-spline radial basis functions and a Kohn-Sham density functional hamiltonian. Both valence and…
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Photoionization dynamics of the RNA base Uracil is studied in the framework of Density Functional Theory (DFT). The photoionization calculations take advantage of a newly developed parallel version of a multicentric approach to the calculation of the electronic continuum spectrum which uses a set of B-spline radial basis functions and a Kohn-Sham density functional hamiltonian. Both valence and core ionizations are considered. Scattering resonances in selected single-particle ionization channels are classified by the symmetry of the resonant state and the peak energy position in the photoelectron kinetic energy scale; the present results highlight once more the site specificity of core ionization processes. We further suggest that the resonant structures previously characterized in low-energy electron collision experiments are partly shifted below threshold by the photoionization processes. A critical evaluation of the theoretical results providing a guide for future experimental work on similar biosystems.
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Submitted 25 October, 2007;
originally announced October 2007.
