Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures
Authors:
Yulia Borodaenko,
Dmitriy Pavlov,
Artem Cherepakhin,
Eugeny Mitsai,
Andrei Pilnik,
Sergey Syubaev,
Stanislav O. Gurbatov,
Evgeny Modin,
Aleksey P. Porfirev,
Svetlana N. Khonina,
Aleksandr V. Shevlyagin,
Evgeny L. Gurevich,
Aleksandr A. Kuchmizhak
Abstract:
Here, upon systematic studies of femtosecond-laser processing of monocrystalline Si in oxidation-preventing methanol, we showed that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and resulting morphology upon subsequent multi-pulse exposure. In particular, under promoted exposure quasi-regular subwav…
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Here, upon systematic studies of femtosecond-laser processing of monocrystalline Si in oxidation-preventing methanol, we showed that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and resulting morphology upon subsequent multi-pulse exposure. In particular, under promoted exposure quasi-regular subwavelength laser-induced periodic surface structures (LIPSSs) were justified to evolve through the template-assisted development of the Rayleigh-Plateau hydrodynamic instability in the molten ridges forming quasi-regular surface patterns with a supra-wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion-assisted morphology rearrangement resulting in a spiky surface with a random orientation, yet constant inter-structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra-wavelength nanostructure formation, our experiments also demonstrated that the resulting quasi-regular and random spiky morphology can be tailored by the intensity/polarization distribution of the incident laser beam allowing on-demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity in the visible and shortwave IR spectral ranges. Finally, we highlighted the practical attractiveness of the suggested approach for improving near-IR photoresponse and expanding operation spectral range of vertical p-n junction Si photo-detector operating under room temperature and zero-bias conditions via single-step annealing-free laser nanopatterning of its surface.
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Submitted 30 August, 2023;
originally announced August 2023.
Plasmonic Nanolenses Produced by Cylindrical Vector Beam Printing for Sensing Applications
Authors:
S. A. Syubaev,
A. Yu. Zhizhchenko,
D. V. Pavlov,
S. O. Gurbatov,
E. V. Pustovalov,
A. P. Porfirev,
S. N. Khonina,
S. A. Kulinich,
J. B. B. Rayappan,
S. I. Kudryashov,
A. A. Kuchmizhak
Abstract:
Here, we demonstrate a simple direct maskless laser-based approach for fabrication of back-reflector-coupled plasmonic nanorings arrays. The approach is based on delicate ablation of an upper metal film of a metal-insulator-metal (MIM) sandwich with donut-shaped laser pulses followed by argon ion-beam polishing. After being excited with a radially polarized beam, the as-prepared MIM configuration…
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Here, we demonstrate a simple direct maskless laser-based approach for fabrication of back-reflector-coupled plasmonic nanorings arrays. The approach is based on delicate ablation of an upper metal film of a metal-insulator-metal (MIM) sandwich with donut-shaped laser pulses followed by argon ion-beam polishing. After being excited with a radially polarized beam, the as-prepared MIM configuration of the nanorings permitted to realize efficient nanofocusing of constructively interfering plasmonic waves excited in the gap area between the nanoring and back-reflector mirror. For optimized geometric parameters of such MIM structure, substantial enhancement of the electromagnetic near-fields at the center of the ring within a single focal spot with the size of 0.37$λ^{2}$ can be achieved, which is confirmed by Finite Difference Time Domain (FDTD) calculations, as well as by detection of enhanced PL signal from adsorbed organic dye molecules. The simple large-scale and cost-efficient fabrication procedure used, along with relatively good tolerance to excitation beam misalignment, make the proposed structures promising for realization of various nanophotonic and biosensing platforms that utilize cylindrical vector beam as a pump source.
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Submitted 17 September, 2019;
originally announced September 2019.
