Point-Spread Function of the Optics in Scanning Electron Microscopes
Authors:
Surya Kamal,
Richard K. Hailstone
Abstract:
Point-spread function of the probe forming optics ($PSF_{optics} $) is reported for the first time in an uncorrected (without multipole correctors) scanning electron microscope (SEM). In an SEM, the electron probe information is lost as the beam interacts with the specimen. We show how the probe phase information can be recovered from reconstructed probe intensity estimates. Controlled defocus was…
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Point-spread function of the probe forming optics ($PSF_{optics} $) is reported for the first time in an uncorrected (without multipole correctors) scanning electron microscope (SEM). In an SEM, the electron probe information is lost as the beam interacts with the specimen. We show how the probe phase information can be recovered from reconstructed probe intensity estimates. Controlled defocus was used to capture a focal-series of SEM images of $28.5\;nm $ gold ($\mathrm{Au} $) nanoparticles ($\mathrm{NPs} $) on a carbon ($\mathrm C $) film. These images were used to reconstruct their respective probe intensities to create a focal-series of probe intensities, which were the input to the phase retrieval pipeline. Using the complete description (intensity and phase) of the electron probe wavefunction at the specimen plane, we report the $PSF_{optics} $ for multiple data sets for beam energy $E\;=20\;keV\; $. This work opens up new possibilities for an alternative way of aberration correction and aberration-free imaging in scanning electron microscopy.
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Submitted 1 July, 2024;
originally announced July 2024.
The influence of structural disorder on magnetic domain formation in perpendicular anisotropy thin films
Authors:
M. S. Pierce,
J. E. Davies,
J. J. Turner,
K. Chesnel,
E. E. Fullerton,
J. Nam,
R. Hailstone,
S. D. Kevan,
J. B. Kortright,
Kai Liu,
L. B. Sorensen,
B. R. York,
O. Hellwig
Abstract:
Using a combination of resonant soft x-ray scattering, magnetometry, x-ray reflectivity and microscopy techniques we have investigated the magnetic properties and microstructure of a series of perpendicular anisotropy Co/Pt multilayer films with respect to structural disorder tuned by varying the sputtering deposition pressure. The observed magnetic changes in domain size, shape and correlation le…
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Using a combination of resonant soft x-ray scattering, magnetometry, x-ray reflectivity and microscopy techniques we have investigated the magnetic properties and microstructure of a series of perpendicular anisotropy Co/Pt multilayer films with respect to structural disorder tuned by varying the sputtering deposition pressure. The observed magnetic changes in domain size, shape and correlation length originate from structural and chemical variations in the samples, such as chemical segregation and grain formation as well as roughness at the surface and interfaces, which are all impacted by the deposition pressure. For low pressure samples we find evidence of a random "gas-like" distribution of magnetic domains, while in the higher pressure samples the domain structure exhibits only short range "liquid-like" positional ordering. The structural and chemical disorder induced by the higher deposition pressure first leads to an increase in the number of magnetic point defects that limit free domain wall propagation. Then, as the sputtering pressure is further increased, the domain wall energy density is lowered due to the formation of local regions with reduced magnetic moment, and finally magnetically void regions appear that confine the magnetic domains and clusters, similar to segregated granular magnetic recording media.
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Submitted 14 May, 2013; v1 submitted 8 January, 2013;
originally announced January 2013.
