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Encapsulation of phosphorus dopants in silicon for the fabrication of a quantum computer
| Lars Oberbeck: | Is registered as an author of this paper. Not currently an endorser. (why?) |
N. J. Curson, M. Y. Simmons, R. Brenner, A. R. Hamilton, S. R. Schofield and R. G. Clark are not registered as owners of this paper. (why?)